Simultaneous incorporation of micron and submicron fabrication, imaging in single X-ray beamline

Iridescence, found in insect wings, snakeskin, and sea shells, refers to the shifting hue of an object depending on the angle of observation. This phenomenon occurs because microstructures on the objects’ surface cause interference.

Using lithographic methods to replicate the complicated pattern of overlapped microstructures would dramatically increase the level of detail, but would require micron and submicron microfabrication to be performed by the same beamline simultaneously. Fortunately, Yamamoto et al. developed such an X-ray lithographic device that not only achieves multi-scale fabrication but also incorporates non-destructive cross-sectional imaging.

“We designed and built this beamline to achieve a processed surface roughness of less than a nanometer and to create multiscale, large-area, high-aspect structures,” said author Akinobu Yamaguchi. “Furthermore, if we can evaluate the shape by non-destructive fluoroscopy of the processed material as it is, we can fabricate devices while proceeding with processing and evaluation at the same time.”

The X-ray beams allow for the highest possible detail compared to similar methods like electron-beam lithography and 3D printing. This advanced functionality could be used to create semiconductor chips, reflector gratings, and heat exchangers, as well as replicate the detailed materials that exist in nature.

Integrating non-destructive imaging into the beam enables additional applications and could be used to improve 3D printing technology.

“The ability to evaluate the fabricated products using X-ray fluoroscopy is a great advantage, allowing in-situ observation of living organisms, insects, and other objects in liquids,” Yamaguchi said. “X-ray imaging while performing tensile or heating tests is also possible, and the relatively low energy X-ray imaging system is suitable for imaging plastics and living organisms.”

Source: “X-ray multi-scale microfabrication system and X-ray imaging evaluation system all in one beamline,” by Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, and Akinobu Yamaguchi, JVST: B (2023). The article can be accessed at https://doi.org/10.1116/6.0003021 .

This paper is part of the Papers from the 66th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN 2023) Collection, learn more here.